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Introduction to Exhaust Management, Abatement, and Air Emissions in the Semiconductor Industry

This 1-day course provides an overview of air quality permitting, compliance, testing, abatement, and exhaust management for the semiconductor industry. Designed for personnel responsible for air quality and controls, the course covers such essential topics as semiconductor process emissions calculations (including GHGs), controls and abatement, and exhaust management.


Course topics
  • Wafer fab exhaust systems and centralized abatement devices
  • Semiconductor processes and chemistries
  • Point-of-use (POU) abatement devices and exhaust management
  • Semiconductor process emissions calculation methodologies and point-of-use abatement and centralized abatement removal efficiencies
  • Typical exhaust and stack sampling techniques, including ISMI Environmental Characterization Guidelines, EPA POU Abatement Greenhouse Gas DRE Test Protocol, and EPA Test Methods
  • Greenhouse Gas Reporting (40 CFR Part 98 Subparts A, C and I)
  • Toxic Release Inventory (TRI) reporting
  • Additional topics like RCRA and wastewater if requested by course participants


Register now
Aug 18 - 19, 2020 -- Online
Day 1 : 8:00 AM - 12:00 PM PST/PDT
Day 2 : 8:00 AM - 12:00 PM PST/PDT


What others are saying about this course
  • I appreciated having real-world examples of POU abatement systems in use in the industry.
  • It covered a lot of ground but allowed for discussion
  • The overall knowledge of the instructor was great.

Partner courses

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Introduction to Semiconductor Industry Toxic Release Inventory and Greenhouse Gas Emissions Reporting

This 1-day course is for personnel in the semiconductor industry responsible for ensuring compliance with the Toxic Release Inventory (TRI) and greenhouse gas (GHG) emissions reporting programs. This course will cover essential topics such as key regulatory definitions, exemptions, threshold determinations, emissions calculations, and common compliance pitfalls for both programs. This course includes real-world case studies and exercises to maximize understanding of this material.  

Aug 25 - 26, 2020 -- Online