Introduction to Exhaust Management, Abatement, and Air Emissions in the Semiconductor Industry

This 1-day course provides an overview of air quality permitting, compliance, testing, abatement, and exhaust management for the semiconductor industry. Designed for personnel responsible for air quality and controls, the course covers such essential topics as semiconductor process emissions calculations (including GHGs), controls and abatement, and exhaust management.


Course topics
  • Wafer fab exhaust systems and centralized abatement devices
  • Semiconductor processes and chemistries
  • Point-of-use (POU) abatement devices and exhaust management
  • Semiconductor process emissions calculation methodologies and point-of-use abatement and centralized abatement removal efficiencies
  • Typical exhaust and stack sampling techniques, including ISMI Environmental Characterization Guidelines, EPA POU Abatement Greenhouse Gas DRE Test Protocol, and EPA Test Methods
  • Greenhouse Gas Reporting (40 CFR Part 98 Subparts A, C and I)
  • Toxic Release Inventory (TRI) reporting
  • Additional topics like RCRA and wastewater if requested by course participants


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Sep 20, 2018 -- Phoenix, AZ
8:00 AM - 5:00 PM
Feb 21, 2019 -- San Jose, CA
8:00 AM - 5:00 PM
What others are saying about this course
  • I appreciated having real-world examples of POU abatement systems in use in the industry.
  • It covered a lot of ground but allowed for discussion
  • The overall knowledge of the instructor was great.